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Extreme ultraviolet lithography
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171 $Electromagnetic spectrum / Spectroscopy / Extreme ultraviolet lithography / Silicon dioxide / Ultraviolet / Quartz / X-ray / Refractive index / Silicon / Chemistry / Physics / Electromagnetic radiation$	X-Ray Data Booklet Section 4.1 MULTILAYERS AND CRYSTALS James H. Underwood Add to Reading List Source URL: xdb.lbl.gov Language: English - Date: 2008-12-02 11:58:18 Electromagnetic spectrum Spectroscopy Extreme ultraviolet lithography Silicon dioxide Ultraviolet Quartz X-ray Refractive index Silicon Chemistry Physics Electromagnetic radiation
172	Measurement of the role of secondary electrons in EUV resist exposures June 12, 2013 Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2013-07-15 22:17:45 Scientific method Extreme ultraviolet lithography Extreme ultraviolet Electron energy loss spectroscopy Electron Ultraviolet Photoemission spectroscopy Secondary electrons Ellipsometry Physics Electromagnetic radiation Spectroscopy
173	Performance optimization of Si/Gd extreme ultraviolet multilayers David L. Windt,1,* Jeffrey A. Bellotti,1 Benjawan Kjornrattanawanich,2 Add to Reading List Source URL: www.rxollc.com Language: English - Date: 2009-10-01 09:55:08 Extreme ultraviolet lithography Reflectivity Silicon nitride Ultraviolet X-ray reflectivity Gadolinium R-value Chemistry Matter Physics
174	2006 Lithography Update Michael Lercel And the rest of the Litho TWG’s Add to Reading List Source URL: www.itrs.net Language: English - Date: 2006-12-05 09:53:48 32 nanometer 45 nanometer Ultraviolet Resist Extreme ultraviolet lithography Microtechnology Materials science Multiple patterning Immersion lithography
175	2006 Lithography Update Michael Lercel And the rest of the Litho TWG’s Add to Reading List Source URL: www.itrs.net Language: English - Date: 2006-12-05 09:53:48 32 nanometer 45 nanometer Ultraviolet Resist Extreme ultraviolet lithography Microtechnology Materials science Multiple patterning Immersion lithography
176	INTERNATIONAL TECHNOLOGY ROADMAP FOR Add to Reading List Source URL: www.itrs.net Language: English - Date: 2012-01-10 11:47:02 Semiconductor device fabrication Extreme ultraviolet lithography Multiple patterning Computational lithography Photolithography Photomask Optical proximity correction Overlay Control 11 nanometer Microtechnology Materials science Technology
177	Laser Produced Plasma EUV Sources for Device Development and HVM David C. Brandt, Igor V. Fomenkov, Michael J. Lercel, Bruno M. La Fontaine, David W. Add to Reading List Source URL: www.cymer.com Language: English* - Date: 2012-05-17 13:30:57 Extreme ultraviolet lithography Cymer Inc. Extreme ultraviolet Mechanical engineering Laser Plasma Microelectromechanical systems Physics Materials science Electromagnetic radiation
178	PDF Document Add to Reading List Source URL: smt.zeiss.com Language: English - Date: 2013-10-16 07:10:30 Extreme ultraviolet lithography Photomask Ultraviolet
179	PDF Document Add to Reading List Source URL: www.promoptica.be Language: English - Date: 2013-04-02 09:22:23 Electromagnetic radiation Astrophysics Light sources Space telescopes Sun Extreme ultraviolet lithography Extreme ultraviolet Corona Ultraviolet Plasma physics Physics Space plasmas
180	PDF Document Add to Reading List Source URL: www.biox.kth.se Language: English - Date: 2007-05-31 08:46:03 Microbiology Electron microscopy Microscopes X-ray microscope Optical microscope Electron microscope Stereo microscope Extreme ultraviolet lithography Condenser Scientific method Science Microscopy

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